Taihu Hall, Wuxi International Convention Center, Wuxi, China
Main Forum: 2026 China Electronic Special Equipment Industry Association Semiconductor Equipment Annual Conference
As the annual flagship event for leading semiconductor equipment manufacturers, this gathering brings together industry experts, leading enterprises, research institutes and key players across the supply chain. It focuses on industrial policy, technological trends, market dynamics and supply chain security, with participants collaborating to chart a course for independent innovation and high-quality development in domestic semiconductor equipment sector, thereby guiding the industry’s future direction.
Hall B4, Taihu International Expo Center, Wuxi, China
Seminar on Etching Technology, Processes and Equipment
Global etching technology is currently evolving towards high selectivity, high uniformity, ultra-low damage and 3D etching. Domestic etching equipment has achieved breakthroughs in areas such as dielectric etching and silicon etching; however, process yield, stability and core parts for advanced processes still require continuous optimization.
Key topics:
(1) Global advanced etching technology roadways and evolution trends over the next 3–5 years
(2) Challenges and solutions in 7nm/5nm advanced process etching
(3) Case studies of industrial applications for domestically produced etching equipment and practices for yield improvement
(4) Pathways for the localization of core parts in etching equipment
(5) Sharing of experiences in joint R&D between foundries and equipment manufacturers, and collaborative process optimization
Hall B4, Taihu International Expo Center, Wuxi, China
Path to Sovereign Semiconductor Fab
The Russian industry is making confident steps in the development of sovereign equipment, materials, chemistry, and design tools for semiconductor factories. It is important to ensure independence from proprietary technologies by developing own key components and software. Russian manufacturers will present their reports on lithographic, plasma-chemical, metrology and epitaxial equipment, as well as advanced materials, gases and chemistry. Forum will provide an opportunity to discuss the prospects for cooperation between leading Russian and Chinese enterprises in this field.