Intelligent Sensing for the Future of Chips - Collaborative Innovation Forum on High-Precision Sensing Technology for Semiconductor Equipment
In semiconductor manufacturing, high-precision sensing technology directly determines the process stability of equipment and product yield. The perception and feedback of its control system on environmental parameters, working condition parameters, and material physical and chemical properties are extremely important. This forum brings together experts and scholars from semiconductor equipment manufacturers, sensor manufacturing enterprises, and research institutions to share the latest scientific research achievements and practical application cases, and jointly explore how to empower industrial upgrading through technological innovation.
Time |
Thursday, September 4th, 9:30-12:00 |
Venue |
Hall A5, Taihu International Expo Center, Wuxi, China |
Theme | High-precision sensing technology |