Forum on Semiconductor Equipment and Instruments Empowering Scientific Research and Teaching Development

Forum on Semiconductor Equipment and Instruments Empowering Scientific Research and Teaching Development

Precision testing and measurement instruments play a pivotal role in semiconductor scientific research, teaching, and talent cultivation. This forum focuses on analyzing the innovative application paradigms of cutting-edge precision equipment in industry, academia, and research. As an advanced manufacturing technology, semiconductor manufacturing requires obtaining accurate data and morphological characteristics in the microcosmic world, which is not only crucial for scientific research and production, but also particularly valuable in teaching. These instruments can vividly demonstrate the properties of semiconductors, making them indispensable devices for "analysis and discovery" in the research process.

TIME	Thursday, September 4th,13:30-17:00
Venue	Hall A5, Taihu International Expo Center, Wuxi, China
Theme	Semiconductor equipment and instruments

Forum on Semiconductor Equipment and Instruments Empowering Scientific Research and Teaching Development

Meeting time	Thursday, September 4th,13:30-17:00
Meeting address	Hall A5, Taihu International Expo Center, Wuxi, China

13:30 -13:55

Real-Time Monitoring and Control Technologies for Atomic-Scale Manufacturing of Integrated Circuits

Xinhe Wang

Deputy Dean, School of Integrated Circuits, Beihang University
13:55 -14:20

Strong-field Laser Physics and Applications

Liangliang Ji

Research Scientist of Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
14:20 -14:45

Low-energy,highly nonlinear super-resolution microscopy

Qiuqiang Zhan

Professor of South China Normal University
14:45 -15:10

Photolithography in wafer-scale photonic integration in the context of compute first networking

Zizheng Cao

Professor/Deputy Director，Pengcheng Laboratory
15:10 -15:35

Dynamics and control of lithographic and metrology tools

Chenyang Ding

Professor of Fudan University
15:35 -16:00

Exploration and practice of ultra-precision motion systems

LIU YANG

Professor and Doctoral Supervisor at Harbin Institute of Technology
16:00 -16:25

Construction of Practical Teaching System in School of Integrated Circuits, Sun Yat-sen University

Jianming Xu

Vice Dean of the School of Integrated Circuits at Sun Yat-sen University
16:25 -17:00

Roundtable Discussion

Nan Lin

Professor of Beihang University

Chenyang Ding

Professor of Fudan University

Xinhe Wang

Deputy Dean, School of Integrated Circuits, Beihang University

Jing Li

Professor of Zhejiang University

Jianming Xu

Vice Dean of the School of Integrated Circuits at Sun Yat-sen University

Special Guests of the Conference

Research Scientist of Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

Deputy Dean, Integrated Circuit School，Beihang University

Professor of South China Normal University

Professor/Deputy Director，Pengcheng Laboratory

Professor of Fudan University

Professor and Doctoral Supervisor at Harbin Institute of Technology

Vice Dean of the School of Integrated Circuits at Sun Yat-sen University

Vice Director，Key Laboratory of Ultra-intense laser Science and Technology（Chinese Academy of Sciences）

Special Professor, School of Mechanical Engineering, Zhejiang University

Next Agenda

September 5th,09:30-12:10

Forum on the Interaction of Manufacturing Processes and Semiconductor Equipment Industry Chain Development

View all agendas