2024 Forum on Semiconductor Equipment and Instruments Empowering Scientific Research and Teaching Development

Wang Xinhe, Associate Professor and PhD Supervisor at Beihang University, Beijing Nova Program. His research focuses on integrated circuit equipment (process monitoring & metrology technologies) and novel device circuits (spintronics & carbon-based electronics). His work has been published in Applied Physics Reviews (cover feature), Science Advances, Nano Letters, etc. He holds 19 granted Chinese invention patents (15 authorized) and 12 first-authored US patents, addressing 4 key IC equipment challenges with industrial translation through leading enterprises.

Dr. Cao Zizheng is a tenured professor/Qiushi Distinguished Professor at College of Integrated Circuits, Zhejiang University, he is recognized as a National High-Level Talent Program awardee. He previously served as a tenured faculty member at Eindhoven University of Technology and a professor at Peng Cheng Laboratory (also the Deputy Director of an Research Institute). He was also a member of the semiconductor advisory expert group at Science, Technology and Innovation Commission of Shenzhen Municipality. His primary research focuses include: 1) Achieving communication, computing, and sensing functions in photonic integrated system-on-chip (SoC) architectures; 2) Developing high-field lithography technologies to support ultra-large-scale photonic SoC and system-on-wafer (SoW) systems.

Professor Li is from Zhejiang University, with nearly 20 years of experiences in development and engineering of ultra-precision metrology technology. Her research interests cover measurement and calibration, complex system integration and control, dynamic and unsteady state modeling, as well as opto-electromechanical system design. She used to work in the institute of the Chinese Academy of Sciences, and had ever worked for an international high-tech company for many years.