Seminar on the Advanced Process Cleaning Technology and Equipment

As advanced processes continue to demand ever-higher standards of cleaning precision, non-destructive cleaning and environmental sustainability, single-wafer cleaning and green cleaning have become the mainstream. Whilst domestically produced cleaning equipment is able to supply mature processes reliably, there is still room for improvement in cleaning equipment specifically designed for advanced processes.

Key Topics:

(1) Challenges in cleaning processes and future technical directions

(2) Technical comparison and application selection of single-wafer versus tank-type cleaning equipment

(3) Innovations in eco-friendly cleaning solutions and green cleaning processes

(4) Cleaning solutions for large-size wafers and 3D chip structures

(5) Case studies on the large-scale application of domestic cleaning equipment and its integration into the full production workflow